Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays
نویسندگان
چکیده
منابع مشابه
Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays.
Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 µm CMOS technology proce...
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Single-photon avalanche diode (SPAD) imagers typically have a relatively low fill factor, i.e. a low proportion of the pixel's surface is light sensitive, due to in-pixel circuitry. We present a microlens array fabricated on a 128×128 single-photon avalanche diode (SPAD) imager to enhance its sensitivity. The benefits and limitations of these light concentrators are studied for low light imagin...
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Production of microlens arrays using the resist reflow technique has been extensively reported1,2. Theses arrays have fill factors approaching 75% and in lensed systems the unlensed light introduces noise into the imaging system. N T Gordon, C L Jones and D Purdy3 reported a sophisticated techniques able to create full fill, however, this is expensive. Davies and McCormick4, using optical litho...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2015
ISSN: 1094-4087
DOI: 10.1364/oe.23.033777